IMEC’s silicon photonic waveguides with bio-compatible modifications developed with Genalyte.
"These chips allow for high levels of multiplexed biosensing due to the high integration level of silicon photonics," said IMEC.
Bio-compatible passivation is applied to whole 200mm wafers, which are built on an in-house standard CMOS line. Chip features go down to 100nm.
"The chips contain up to 128 proprietary ring resonator sensors coated by Genalyte with application-specific chemistry to create sensitive molecular detection capability," said IMEC. "On-chip grating couplers are used to couple the infrared light from and to Genalyte’s diagnostic equipment."
IMEC offers multi-project wafers on the same line under ePIXfab through which Genalyte first made a proof-of-concept.
